CVD Silicon Carbide (SiC) Coating

Characteristics:

⏺ Extremely High Temperature Resistance: CVD-formed SiC coatings can be used stably for extended periods in environments above 1000°C, are not easily oxidized, have a low coefficient of thermal expansion, and exhibit excellent thermal stability.

⏺ High Hardness and Wear Resistance: With a Mohs hardness of approximately 9.2–9.5, second only to diamond and cubic boron nitride (cBN), it effectively prevents mechanical wear, particle impact, and etching loss.

⏺ Excellent Chemical Inertness: It exhibits extremely high corrosion resistance to acids, alkalis, and most chemical solutions (such as HCl, HF, and H₂SO₄). Suitable for use in semiconductor etching cavities, protective coatings for quartz components, etc.

⏺ High Purity and Low Particulate Contamination: Impurity content can be controlled to be extremely low (>99.999%). With a smooth surface and extremely low particle shedding rate, it is suitable for high-cleanliness processes (such as wafer etching and CVD/ALD chambers).

⏺ Excellent thermal conductivity and electrical insulation: High thermal conductivity (approximately 120–200 W/m·K) allows for rapid heat dissipation, while also possessing excellent electrical insulation properties, maintaining current isolation even at high temperatures.

Applications:

(1) Semiconductor Industry Applications

    ⏺ Wafer carriers, ring components, reaction chamber inner walls, heat shields

    ⏺ MOCVD, LPCVD, PECVD reaction chamber components

    ⏺ Carrier pads for crystal growth or epitaxy equipment

    ⏺ Protective layers for dry etching chambers

    ⏺ High wear-resistant friction surface coatings for CMP equipment

    ⏺ Rapid annealing carrier pads

(2) Aerospace and Energy Applications

    ⏺ Gas turbine blades, combustion chamber liners

    ⏺ Heat exchangers and thermal shields

    ⏺ Protective coatings for SiC fiber composite materials

(3) Optics and Precision Applications

    ⏺ Protective layers for infrared optical component substrates (improving oxidation resistance and wear resistance)

    ⏺ High-reflectivity mirror base (maintains shape stability and high surface smoothness)

(4) Other applications

    ⏺ Nuclear energy material coating

    ⏺ High-temperature sensor and probe outer protective film

    ⏺ Hard coated cutting tool or mold material

Services:

◼️ Provide CVD silicon carbide (SiC) coating contract manufacturing services.